- Title
- Tracking control of a monolithic piezoelectric nanopositioning stage using an integrated sensor
- Creator
- Omidbeike, Meysam; Teo, Yik R.; Yong, Yuen K.; Fleming, Andrew J.
- Relation
- 20th IFAC World Congress. 20th IFAC World Congress Proceedings [presented in IFAC-PapersOnLine, Vol. 50, Issue 1] (Toulouse, France 9-14 July, 2017) p. 10913-10917
- Publisher Link
- http://dx.doi.org/10.1016/j.ifacol.2017.08.2455
- Publisher
- Elsevier
- Resource Type
- conference paper
- Date
- 2017
- Description
- This article describes a method for tracking control of monolithic nanopositioning systems using integrated piezoelectric sensors. The monolithic nanopositioner is constructed from a single sheet of piezoelectric material where a set of flexures are used for actuation and guidance, and another set are used for position sensing. This arrangement is shown to be highly sensitive to in-plane motion (in the x- and y-axis) and insensitive to vertical motion, which is ideal for position tracking control. The foremost difficulty with piezoelectric sensors is their low-frequency high-pass response. In this article, a simple estimator circuit is used to allow the direct application of integral tracking control. Although the system operates in open-loop at DC, dynamic command signals such as scanning trajectories are accurately tracked. Experimental results show significant improvements in linearity and positioning error.
- Subject
- nanopositioner; tracking control; piezoelectric
- Identifier
- http://hdl.handle.net/1959.13/1395174
- Identifier
- uon:33825
- Identifier
- ISSN:2405-8963
- Rights
- This article is published under a Creative Commons Attribution-Noncommercial-NoDerivative Works 4.0 International License (CC-BY-NC-ND) https://creativecommons.org/licenses/by-nc-nd/4.0/.
- Language
- eng
- Full Text
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